Proceedings Vol. 14 (2008)
ENGINEERING MECHANICS 2008
NATIONAL CONFERENCE WITH INTERNATIONAL PARTICIPATION
May 12 – 15, 2008, Svratka, Czech Republic
;
May 12 – 15, 2008, Svratka, Czech Republic
Editors: Vladimír Fuis and Michal Pásek
Copyright © 2008 Institute of Thermomechanics, Academy of Sciences of the Czech Republic, v.v.i., Prague
ISBN 978-80-87012-11-6 (printed)
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)
list of papers scientific commitee
USING COSMOS FLOWORKS TO DESIGN THE DIFFERENTIALLY PUMPED CHAMBER
Maxa J., Neděla V.
pages 156 - +9p., full text
pages 156 - +9p., full text
Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses and compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.
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Text and facts may be copied and used freely, but credit should be given to these Proceedings.
All papers were reviewed by members of the scientific committee.