Proceedings Vol. 15 (2009)
ENGINEERING MECHANICS 2009
May 11 – 14, 2009, Svratka, Czech Republic
Copyright © 2009 Institute of Theoretical and Applied Mechanics, Academy of Sciences of the Czech Republic, v.v.i., Prague
ISSN 1805-8248 (printed)
ISSN 1805-8256 (electronic)
list of papers scientific commitee
pages 1273 - 1279, full text
The article presents application of Phase shifting interferometry (PSI) in 3D optical profiler for in-situ studying of real tribological problems. The article consists of methodology description, used algorithms, experimental apparatus and developed software. Results for measurement accuracy verification, using SHS 880 QC VLSI standard, are presented in this study. Application of this method on real rough surfaces is also presented. Finally, possibilities of extension and innovation of 3D profiler are contained in conclusion section of this article.
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All papers were reviewed by members of the scientific committee.